Inventor
YAMADA YASUYOSHI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “YAMADA YASUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
7 patentsUS4794648ADec 27, 1988
Mask aligner with a wafer position detecting device
CANON KK64 citations96
US4599000AJul 8, 1986
Position detection signal processing apparatus
CANON KK68 citations95
US6185474B1Feb 6, 2001
Exposure unit, exposure system and device manufacturing method
CANON KK38 citations89
US4655599AApr 7, 1987
Mask aligner having a photo-mask setting device
CANON KK18 citations73
US4563094AJan 7, 1986
Method and apparatus for automatic alignment
CANON KK18 citations73
US4515481AMay 7, 1985
Apparatus for processing a signal for aligning
CANON KK16 citations73
US4487505ADec 11, 1984
Apparatus for processing a signal for alignment
CANON KK4 citations60