Inventor
IRIE SHIGEO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “IRIE SHIGEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PANASONIC CORP
3 patentsUS9291889B2Mar 22, 2016
Photo mask and method for forming pattern using the same
PANASONIC CORP9 citations83
US7998641B2Aug 16, 2011
Photomask and pattern formation method using the same
PANASONIC CORP3 citations59
US8007959B2Aug 30, 2011
Photomask and pattern formation method using the same
PANASONIC CORP1 citations50
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
3 patentsUS6855485B2Feb 15, 2005
Pattern forming method and apparatus for fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations72
US6984472B2Jan 10, 2006
Exposure method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations61
US6966710B2Nov 22, 2005
Pattern forming method and apparatus for fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations61
SHINETSU CHEMICAL CO
3 patentsUS11061319B2Jul 13, 2021
Photomask blank and making method
SHINETSU CHEMICAL CO2 citations71
US11073756B2Jul 27, 2021
Photomask blank, photomask blank making method, and photomask making method
SHINETSU CHEMICAL CO0 citations46
US10585345B2Mar 10, 2020
Photomask blank, method for manufacturing photomask, and mask pattern formation method
SHINETSU CHEMICAL CO0 citations41