Inventor

LU HUNGYUEH

TW2 patents

Patents

2 patents

US6526996B1Mar 4, 2003

Dry clean method instead of traditional wet clean after metal etch

PROMOS TECHNOLOGIES INC78 citations92

US6500766B2Dec 31, 2002

Post-cleaning method of a via etching process

PROMOS TECHNOLOGIES INC8 citations68