Inventor
CHANG HONG-LONG
TW7 patents
Patents
7 patentsUS6526996B1Mar 4, 2003
Dry clean method instead of traditional wet clean after metal etch
PROMOS TECHNOLOGIES INC78 citations92
US6143653ANov 7, 2000
Method of forming tungsten interconnect with tungsten oxidation to prevent tungsten loss
PROMOS TECHNOLOGIES INC25 citations91
US6410417B1Jun 25, 2002
Method of forming tungsten interconnect and vias without tungsten loss during wet stripping of photoresist polymer
PROMOS TECHNOLOGIES INC11 citations72
US6500766B2Dec 31, 2002
Post-cleaning method of a via etching process
PROMOS TECHNOLOGIES INC8 citations68
US7241659B2Jul 10, 2007
Volatile memory devices and methods for forming same
PROMOS TECHNOLOGIES INC2 citations57
US6399509B1Jun 4, 2002
Defects reduction for a metal etcher
PROMOS TECHNOLOGIES INC4 citations56
US7344995B2Mar 18, 2008
Method for preparing a structure with high aspect ratio
PROMOS TECHNOLOGIES INC0 citations33