Inventor
REINHORN SILVIU
IL26 patents
⚠️ This page may combine multiple inventors who share the name “REINHORN SILVIU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS6317514B1Nov 13, 2001
Method and apparatus for inspection of patterned semiconductor wafers
APPLIED MATERIALS INC106 citations98
US6671398B2Dec 30, 2003
Method and apparatus for inspection of patterned semiconductor wafers
APPLIED MATERIALS INC53 citations96
US6587193B1Jul 1, 2003
Inspection systems performing two-dimensional imaging with line light spot
APPLIED MATERIALS INC28 citations93
US6853446B1Feb 8, 2005
Variable angle illumination wafer inspection system
APPLIED MATERIALS INC52 citations92
US6809808B2Oct 26, 2004
Wafer defect detection system with traveling lens multi-beam scanner
APPLIED MATERIALS INC23 citations92
US6798505B2Sep 28, 2004
Method and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC20 citations92
US6791099B2Sep 14, 2004
Laser scanning wafer inspection using nonlinear optical phenomena
APPLIED MATERIALS INC47 citations92
US6788445B2Sep 7, 2004
Multi-beam polygon scanning system
APPLIED MATERIALS INC48 citations92
US6587194B2Jul 1, 2003
Method of and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC19 citations92
US6429931B1Aug 6, 2002
Method and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC20 citations92
US6924891B2Aug 2, 2005
Method and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC16 citations91
US7190459B2Mar 13, 2007
Multi beam scanning with bright/dark field imaging
APPLIED MATERIALS INC11 citations84
US7399647B2Jul 15, 2008
Multi beam scanning with bright/dark field imaging
APPLIED MATERIALS INC7 citations74
US7053395B2May 30, 2006
Wafer defect detection system with traveling lens multi-beam scanner
APPLIED MATERIALS INC10 citations73
US6853475B2Feb 8, 2005
Wafer defect detection system with traveling lens multi-beam scanner
APPLIED MATERIALS INC11 citations73
US6556294B2Apr 29, 2003
Method of and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC6 citations73
US7463352B2Dec 9, 2008
Method and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC4 citations72