Inventor
SMITH PATRICIA B
US23 patents
Patents
23 patentsUS6277733B1Aug 21, 2001
Oxygen-free, dry plasma process for polymer removal
TEXAS INSTRUMENTS INC268 citations99
US4837113AJun 6, 1989
Method for depositing compound from group II-VI
TEXAS INSTRUMENTS INC475 citations99
US4988533AJan 29, 1991
Method for deposition of silicon oxide on a wafer
TEXAS INSTRUMENTS INC116 citations96
US4877757AOct 31, 1989
Method of sequential cleaning and passivating a GaAs substrate using remote oxygen plasma
TEXAS INSTRUMENTS INC83 citations96
US5157000AOct 20, 1992
Method for dry etching openings in integrated circuit layers
TEXAS INSTRUMENTS INC72 citations95
US7179751B2Feb 20, 2007
Hydrogen plasma photoresist strip and polymeric residue cleanup process for low dielectric constant materials
TEXAS INSTRUMENTS INC22 citations92
US7001848B1Feb 21, 2006
Hydrogen plasma photoresist strip and polymeric residue cleanup process for oxygen-sensitive materials
TEXAS INSTRUMENTS INC25 citations92
US6599829B2Jul 29, 2003
Method for photoresist strip, sidewall polymer removal and passivation for aluminum metallization
TEXAS INSTRUMENTS INC39 citations92
US6342446B1Jan 29, 2002
Plasma process for organic residue removal from copper
TEXAS INSTRUMENTS INC50 citations92
US5318666AJun 7, 1994
Method for via formation and type conversion in group II and group VI materials
TEXAS INSTRUMENTS INC34 citations92
US6838300B2Jan 4, 2005
Chemical treatment of low-k dielectric films
TEXAS INSTRUMENTS INC34 citations91
US6251771B1Jun 26, 2001
Hydrogen passivation of chemical-mechanically polished copper-containing layers
TEXAS INSTRUMENTS INC16 citations84
US6727185B1Apr 27, 2004
Dry process for post oxide etch residue removal
TEXAS INSTRUMENTS INC18 citations83
US4855160AAug 8, 1989
Method for passivating wafer
TEXAS INSTRUMENTS INC8 citations74
US4838984AJun 13, 1989
Method for etching films of mercury-cadmium-telluride and zinc sulfid
TEXAS INSTRUMENTS INC11 citations74
US6967173B2Nov 22, 2005
Hydrogen plasma photoresist strip and polymeric residue cleanup processs for low dielectric constant materials
TEXAS INSTRUMENTS INC9 citations73
US6958294B2Oct 25, 2005
Method for photoresist strip, sidewall polymer removal and passivation for aluminum metallization
TEXAS INSTRUMENTS INC7 citations73
US5077092ADec 31, 1991
Method and apparatus for deposition of zinc sulfide films
TEXAS INSTRUMENTS INC9 citations73
US5017511AMay 21, 1991
Method for dry etching vias in integrated circuit layers
TEXAS INSTRUMENTS INC12 citations72
US7253124B2Aug 7, 2007
Process for defect reduction in electrochemical plating
TEXAS INSTRUMENTS INC4 citations63
US7067441B2Jun 27, 2006
Damage-free resist removal process for ultra-low-k processing
TEXAS INSTRUMENTS INC5 citations62
US7344951B2Mar 18, 2008
Surface preparation method for selective and non-selective epitaxial growth
TEXAS INSTRUMENTS INC3 citations60
US7232768B2Jun 19, 2007
Hydrogen plasma photoresist strip and polymeric residue cleanup process for low dielectric constant materials
TEXAS INSTRUMENTS INC0 citations52