Inventor
LETSON TOM
US3 patents
Patents
3 patentsUS7615462B2Nov 10, 2009
Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack
INTEL CORP154 citations98
US7148565B2Dec 12, 2006
Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack
INTEL CORP61 citations95
US6645832B2Nov 11, 2003
Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack
INTEL CORP67 citations95