Inventor
SHEN YOU-WEI
TW3 patents
Patents
3 patentsUS7146610B2Dec 5, 2006
Method for upgrading software components without system shutdown
TAIWAN SEMICONDUCTOR MFG13 citations77
US7184852B2Feb 27, 2007
System and method for integrating a dispatching system with multiple process lines in a semiconductor manufacturing environment
TAIWAN SEMICONDUCTOR MFG4 citations56
US7133788B2Nov 7, 2006
Process controller for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG2 citations50