Inventor
HOLBROOK DAVID S
US12 patents
⚠️ This page may combine multiple inventors who share the name “HOLBROOK DAVID S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOLBROOK DAVID S
2 patentsMRS TECHNOLOGY INC
2 patentsUS4855792AAug 8, 1989
Optical alignment system for use in photolithography and having reduced reflectance errors
MRS TECHNOLOGY INC20 citations80
US5483345AJan 9, 1996
Alignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection object
MRS TECHNOLOGY INC16 citations70