Inventor
SUMITOMO YASUSUKE
JP7 patents
Patents
7 patentsUS4151034AApr 24, 1979
Continuous gas plasma etching apparatus
TOKYO SHIBAURA ELECTRIC CO121 citations95
US4252595AFeb 24, 1981
Etching apparatus using a plasma
TOKYO SHIBAURA ELECTRIC CO46 citations92
US4094722AJun 13, 1978
Etching apparatus using a plasma
TOKYO SHIBAURA ELECTRIC CO41 citations92
US4131909ADec 26, 1978
Semiconductor integrated circuit isolated through dielectric material and a method for manufacturing the same
TOKYO SHIBAURA ELECTRIC CO24 citations81
US4185294AJan 22, 1980
Semiconductor device and a method for manufacturing the same
TOKYO SHIBAURA ELECTRIC CO23 citations78
US4123565AOct 31, 1978
Method of manufacturing semiconductor devices
TOKYO SHIBAURA ELECTRIC CO24 citations78
US4216491AAug 5, 1980
Semiconductor integrated circuit isolated through dielectric material
TOKYO SHIBAURA ELECTRIC CO8 citations73