Inventor
ADRIAENS JOHANNES MATHIAS THEO
NL4 patents
Patents
4 patentsUS7102736B2Sep 5, 2006
Method of calibration, calibration substrate, and method of device manufacture
ASML NETHERLANDS BV10 citations63
US7283249B2Oct 16, 2007
Lithographic apparatus and a method of calibrating such an apparatus
ASML NETHERLANDS BV2 citations59
US7684011B2Mar 23, 2010
Calibration method for a lithographic apparatus
ASML NETHERLANDS BV2 citations58
US7352473B2Apr 1, 2008
Lithographic apparatus, device manufacturing method, and computer program
ASML NETHERLANDS BV1 citations50