Inventor
ABATCHEV MIRZAFER
US20 patents
⚠️ This page may combine multiple inventors who share the name “ABATCHEV MIRZAFER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
11 patentsUS7429536B2Sep 30, 2008
Methods for forming arrays of small, closely spaced features
MICRON TECHNOLOGY INC98 citations98
US7393789B2Jul 1, 2008
Protective coating for planarization
MICRON TECHNOLOGY INC110 citations98
US9679781B2Jun 13, 2017
Methods for integrated circuit fabrication with protective coating for planarization
MICRON TECHNOLOGY INC27 citations93
US6716758B1Apr 6, 2004
Aspect ratio controlled etch selectivity using time modulated DC bias voltage
MICRON TECHNOLOGY INC52 citations91
US7547599B2Jun 16, 2009
Multi-state memory cell
MICRON TECHNOLOGY INC16 citations84
US9003651B2Apr 14, 2015
Methods for integrated circuit fabrication with protective coating for planarization
MICRON TECHNOLOGY INC9 citations83
US7662299B2Feb 16, 2010
Nanoimprint lithography template techniques for use during the fabrication of a semiconductor device and systems including same
MICRON TECHNOLOGY INC9 citations83
US8011090B2Sep 6, 2011
Method for forming and planarizing adjacent regions of an integrated circuit
MICRON TECHNOLOGY INC2 citations62
US7857982B2Dec 28, 2010
Methods of etching features into substrates
MICRON TECHNOLOGY INC5 citations61
US7473645B2Jan 6, 2009
Method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate
MICRON TECHNOLOGY INC0 citations51
US7291563B2Nov 6, 2007
Method of etching a substrate; method of forming a feature on a substrate; and method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate
MICRON TECHNOLOGY INC1 citations51
ABATCHEV MIRZAFER
4 patentsUS8479384B2Jul 9, 2013
Methods for integrated circuit fabrication with protective coating for planarization
ABATCHEV MIRZAFER6 citations83
US8207614B2Jun 26, 2012
Methods for forming arrays of small, closely spaced features
ABATCHEV MIRZAFER10 citations83
US9099402B2Aug 4, 2015
Integrated circuit structure having arrays of small, closely spaced features
ABATCHEV MIRZAFER4 citations72
US9267605B2Feb 23, 2016
Pressure control valve assembly of plasma processing chamber and rapid alternating process
ABATCHEV MIRZAFER2 citations61