Inventor
LEE MAN-YOUNG
KR5 patents
Patents
5 patentsUS7166183B2Jan 23, 2007
Apparatus and method for treating edge of substrate
SAMSUNG ELECTRONICS CO LTD10 citations79
US5315601AMay 24, 1994
Error correction method and apparatus thereof
SAMSUNG ELECTRONICS CO LTD9 citations72
US5227992AJul 13, 1993
Operational method and apparatus over GF(2m) using a subfield GF(2.sup.
SAMSUNG ELECTRONICS CO LTD15 citations67
US6742281B2Jun 1, 2004
Apparatus for drying semiconductor wafer using vapor dry method
SAMSUNG ELECTRONICS CO LTD2 citations57
US7434589B2Oct 14, 2008
Wafer cleaning apparatus with anticipating malfunction of pump
SAMSUNG ELECTRONICS CO LTD1 citations50