Inventor
LEE SEUNG-KUN
KR14 patents
⚠️ This page may combine multiple inventors who share the name “LEE SEUNG-KUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
11 patentsUS6235147B1May 22, 2001
Wet-etching facility for manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD40 citations91
US6001216ADec 14, 1999
Apparatus and methods for rerecirculating etching solution during semiconductor wafer processing
SAMSUNG ELECTRONICS CO LTD26 citations91
US6146077ANov 14, 2000
Wafer transfer system of semiconductor fabricating equipment using a serial number detecting device
SAMSUNG ELECTRONICS CO LTD25 citations89
US7166183B2Jan 23, 2007
Apparatus and method for treating edge of substrate
SAMSUNG ELECTRONICS CO LTD10 citations79
US6732750B2May 11, 2004
Semiconductor wafer cleaning apparatus and method of using the same
SAMSUNG ELECTRONICS CO LTD8 citations72
US6083320AJul 4, 2000
Robot for and method of transporting semiconductor wafers
SAMSUNG ELECTRONICS CO LTD9 citations72
US6149379ANov 21, 2000
Wafer transfer method using a serial number detecting device in semiconductor fabricating equipment
SAMSUNG ELECTRONICS CO LTD15 citations70
US7887636B2Feb 15, 2011
Substrate dryer and a drying method
SAMSUNG ELECTRONICS CO LTD2 citations61
US7434589B2Oct 14, 2008
Wafer cleaning apparatus with anticipating malfunction of pump
SAMSUNG ELECTRONICS CO LTD1 citations50
US7811921B2Oct 12, 2010
Semiconductor devices having a trench in a side portion of a conducting line pattern and methods of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations42
US7545046B2Jun 9, 2009
Semiconductor devices having a trench in a side portion of a conducting line pattern and methods of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations42