Inventor

KOTA GOWRI

US3 patents

⚠️ This page may combine multiple inventors who share the name “KOTA GOWRI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7491343B2Feb 17, 2009

Line end shortening reduction during etch

LAM RES CORP10 citations80

US7407597B2Aug 5, 2008

Line end shortening reduction during etch

LAM RES CORP2 citations60

KOTA GOWRI

1 patent

US8668805B2Mar 11, 2014

Line end shortening reduction during etch

KOTA GOWRI2 citations54