Inventor

LIN FRANK Y

US10 patents

⚠️ This page may combine multiple inventors who share the name “LIN FRANK Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

6 patents

US6514378B1Feb 4, 2003

Method for improving uniformity and reducing etch rate variation of etching polysilicon

LAM RES CORP36 citations92

US6617257B2Sep 9, 2003

Method of plasma etching organic antireflective coating

LAM RES CORP35 citations89

US6531029B1Mar 11, 2003

Vacuum plasma processor apparatus and method

LAM RES CORP15 citations83

US7491343B2Feb 17, 2009

Line end shortening reduction during etch

LAM RES CORP10 citations80

US7407597B2Aug 5, 2008

Line end shortening reduction during etch

LAM RES CORP2 citations60

US6897156B2May 24, 2005

Vacuum plasma processor method

LAM RES CORP1 citations51

NI TUQIANG

1 patent

US8480913B2Jul 9, 2013

Plasma processing method and apparatus with control of plasma excitation power

NI TUQIANG2 citations61

WINNICZEK JAROSLAW W

1 patent

US8871105B2Oct 28, 2014

Method for achieving smooth side walls after Bosch etch process

WINNICZEK JAROSLAW W2 citations59

KOTA GOWRI

1 patent

US8668805B2Mar 11, 2014

Line end shortening reduction during etch

KOTA GOWRI2 citations54

XU QING

1 patent

US8609548B2Dec 17, 2013

Method for providing high etch rate

XU QING0 citations40