P

Inventor

OZU TOSHIHISA

JP11 patents
⚠️ This page may combine multiple inventors who share the name “OZU TOSHIHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

6 patents
US9337020B2May 10, 2016

Resist mask processing method using hydrogen containing plasma

TOKYO ELECTRON LTD6 citations67
US8980048B2Mar 17, 2015

Plasma etching apparatus

TOKYO ELECTRON LTD1 citations51
US10224220B2Mar 5, 2019

Plasma processing apparatus and plasma etching apparatus

TOKYO ELECTRON LTD0 citations50
US9034698B2May 19, 2015

Semiconductor device manufacturing method

TOKYO ELECTRON LTD0 citations48
US9728417B2Aug 8, 2017

Method for processing base body to be processed

TOKYO ELECTRON LTD0 citations40
US9711371B2Jul 18, 2017

Method of etching organic film

TOKYO ELECTRON LTD0 citations33

OZU TOSHIHISA

2 patents
US8835320B2Sep 16, 2014

Etching method and device

OZU TOSHIHISA3 citations57
US8771537B2Jul 8, 2014

Plasma treatment device and plasma treatment method

OZU TOSHIHISA1 citations47

NISHIZUKA TETSUYA

1 patent
US8753527B2Jun 17, 2014

Plasma etching method and plasma etching apparatus

NISHIZUKA TETSUYA3 citations60

NOZAWA TOSHIHISA

1 patent
US8969210B2Mar 3, 2015

Plasma etching apparatus, plasma etching method, and semiconductor device manufacturing method

NOZAWA TOSHIHISA0 citations40

MITSUBISHI ELECTRIC CORP

1 patent
US7499461B2Mar 3, 2009

Gateway apparatus

MITSUBISHI ELECTRIC CORP0 citations39