Inventor
ITABASHI NAOSHI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “ITABASHI NAOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
12 patentsUS7931776B2Apr 26, 2011
Plasma processing apparatus
HITACHI HIGH TECH CORP8 citations84
US7396771B2Jul 8, 2008
Plasma etching apparatus and plasma etching method
HITACHI HIGH TECH CORP15 citations84
US9997337B2Jun 12, 2018
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP1 citations63
US9076637B2Jul 7, 2015
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP3 citations63
US7908104B2Mar 15, 2011
Plasma processing apparatus and method for detecting status of said apparatus
HITACHI HIGH TECH CORP4 citations63
US7442651B2Oct 28, 2008
Plasma etching method
HITACHI HIGH TECH CORP2 citations62
US11181502B2Nov 23, 2021
Hole formation method and measurement device
HITACHI HIGH TECH CORP0 citations50
US11130985B2Sep 28, 2021
Spot array substrate, method for producing same, and nucleic acid polymer analysis method and device
HITACHI HIGH TECH CORP0 citations50
US10481125B2Nov 19, 2019
Biomolecule measuring device
HITACHI HIGH TECH CORP0 citations41
US10031083B2Jul 24, 2018
Fixed position controller and method
HITACHI HIGH TECH CORP0 citations41
US9759681B2Sep 12, 2017
Biomolecule detection method, biomolecule detection device and analysis device
HITACHI HIGH TECH CORP0 citations41
US10451584B2Oct 22, 2019
Biomolecule measuring device
HITACHI HIGH TECH CORP0 citations39
HITACHI LTD
9 patentsUS5891252AApr 6, 1999
Plasma processing apparatus
HITACHI LTD60 citations96
US6033481AMar 7, 2000
Plasma processing apparatus
HITACHI LTD41 citations92
US5714757AFeb 3, 1998
Surface analyzing method and its apparatus
HITACHI LTD32 citations91
US7601241B2Oct 13, 2009
Plasma processing apparatus and plasma processing method
HITACHI LTD9 citations84
US6673685B2Jan 6, 2004
Method of manufacturing semiconductor devices
HITACHI LTD15 citations84
US7604709B2Oct 20, 2009
Plasma processing apparatus
HITACHI LTD3 citations63
US6797112B2Sep 28, 2004
Plasma treatment apparatus and method of producing semiconductor device using the apparatus
HITACHI LTD2 citations62
US7771607B2Aug 10, 2010
Plasma processing apparatus and plasma processing method
HITACHI LTD1 citations52
US9293300B2Mar 22, 2016
Plasma processing apparatus
HITACHI LTD0 citations41