Inventor

DELAYE MARIE-THERESE

FR12 patents

Patents

12 patents

US5576250ANov 19, 1996

Process for the production of accelerometers using silicon on insulator technology

COMMISSARIAT ENERGIE ATOMIQUE128 citations98

US5912499AJun 15, 1999

Pressure transducer comprising a sealed transducer with a rigid diaphragm

COMMISSARIAT ENERGIE ATOMIQUE55 citations95

US5780885AJul 14, 1998

Accelerometers using silicon on insulator technology

COMMISSARIAT ENERGIE ATOMIQUE55 citations95

US5510276AApr 23, 1996

Process for producing a pressure transducer using silicon-on-insulator technology

COMMISSARIAT ENERGIE ATOMIQUE95 citations95

US6431005B1Aug 13, 2002

Microsystem with a flexible membrane pressure sensor

COMMISSARIAT ENERGIE ATOMIQUE37 citations92

US6392158B1May 21, 2002

Structure equipped with electric contacts formed through said structure substrate and method for obtaining said structure

COMMISSARIAT ENERGIE ATOMIQUE39 citations91

US6435033B2Aug 20, 2002

Process for manufacturing a microsystem with a flexible membrane for a pressure sensor

COMMISSARIAT ENERGIE ATOMIQUE13 citations73

US5781994AJul 21, 1998

Process for the micromechanical fabrication of nozzles for liquid jets

COMMISSARIAT ENERGIE ATOMIQUE14 citations73

US6546623B2Apr 15, 2003

Structure equipped with electrical contacts formed through the substrate of this structure and process for obtaining such a structure

COMMISSARIAT ENERGIE ATOMIQUE12 citations72

US7700457B2Apr 20, 2010

Method and zone for sealing between two microstructure substrates

COMMISSARIAT ENERGIE ATOMIQUE1 citations51

US4912673AMar 27, 1990

Detection system for a magnetic bubble memory in hybrid technology

COMMISSARIAT ENERGIE ATOMIQUE0 citations40

US4773054ASep 20, 1988

Magnetic bubble memory with a hybrid junction

COMMISSARIAT ENERGIE ATOMIQUE0 citations40