Inventor
MODDERMAN THEODORUS MARINUS
NL34 patents
⚠️ This page may combine multiple inventors who share the name “MODDERMAN THEODORUS MARINUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
27 patentsUS7528931B2May 5, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV76 citations99
US7388648B2Jun 17, 2008
Lithographic projection apparatus
ASML NETHERLANDS BV136 citations99
US7193232B2Mar 20, 2007
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid
ASML NETHERLANDS BV216 citations99
US7081943B2Jul 25, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV199 citations99
US6952253B2Oct 4, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1,825 citations99
US7482611B2Jan 27, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV65 citations98
US7372541B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV74 citations98
US7317504B2Jan 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV114 citations98
US7684008B2Mar 23, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV58 citations95
US7982850B2Jul 19, 2011
Immersion lithographic apparatus and device manufacturing method with gas supply
ASML NETHERLANDS BV14 citations93
US7795603B2Sep 14, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations93
US7206058B2Apr 17, 2007
Off-axis levelling in lithographic projection apparatus
ASML NETHERLANDS BV20 citations91
US7078715B2Jul 18, 2006
Lithographic apparatus and apparatus adjustment method
ASML NETHERLANDS BV24 citations91
US9091940B2Jul 28, 2015
Lithographic apparatus and method involving a fluid inlet and a fluid outlet
ASML NETHERLANDS BV5 citations84
US10620545B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US9835960B2Dec 5, 2017
Lithographic apparatus
ASML NETHERLANDS BV1 citations63
US9417535B2Aug 16, 2016
Lithographic apparatus
ASML NETHERLANDS BV2 citations63
US8363208B2Jan 29, 2013
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations62
US11906907B2Feb 20, 2024
Apparatus and method for determining a condition associated with a pellicle
ASML NETHERLANDS BV0 citations59
US7835017B2Nov 16, 2010
Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations59
US10248035B2Apr 2, 2019
Lithographic apparatus
ASML NETHERLANDS BV0 citations52
US10222706B2Mar 5, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9329494B2May 3, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations52
US10001712B2Jun 19, 2018
Immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9964858B2May 8, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US8344341B2Jan 1, 2013
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
US10324384B2Jun 18, 2019
Lithographic apparatus and a method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations40
MODDERMAN THEODORUS MARINUS
3 patentsUS8233137B2Jul 31, 2012
Lithographic apparatus and device manufacturing method
MODDERMAN THEODORUS MARINUS54 citations97
US9116443B2Aug 25, 2015
Lithographic apparatus and device manufacturing method
MODDERMAN THEODORUS MARINUS6 citations83
US8462312B2Jun 11, 2013
Lithographic apparatus and device manufacturing method
MODDERMAN THEODORUS MARINUS6 citations83
LOF JOERI
3 patentsUS8797503B2Aug 5, 2014
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure
LOF JOERI5 citations84
US9195153B2Nov 24, 2015
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52
US8208120B2Jun 26, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52