Inventor

TSURUTA KAORU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “TSURUTA KAORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

3 patents

US9190245B2Nov 17, 2015

Charged particle beam writing apparatus, and charged particle beam writing method

NUFLARE TECHNOLOGY INC6 citations70

US9472372B2Oct 18, 2016

Charged particle beam writing apparatus and charged particle beam writing method

NUFLARE TECHNOLOGY INC1 citations49

US11352694B2Jun 7, 2022

Drawing apparatus and control method thereof

NUFLARE TECHNOLOGY INC0 citations46

TSURUTA KAORU

2 patents

US8183544B2May 22, 2012

Correcting substrate for charged particle beam lithography apparatus

TSURUTA KAORU10 citations80

US8748843B2Jun 10, 2014

Charged particle beam drawing apparatus and charged particle beam drawing method

TSURUTA KAORU2 citations55