Inventor

CHO HYEON-MO

KR4 patents

⚠️ This page may combine multiple inventors who share the name “CHO HYEON-MO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIM MI-YOUNG

2 patents

US9140986B2Sep 22, 2015

Resist underlayer composition and process of producing integrated circuit devices using the same

KIM MI-YOUNG2 citations60

US8758981B2Jun 24, 2014

Photoresist underlayer composition and method of manufacturing semiconductor device by using the same

KIM MI-YOUNG0 citations40

KIM SANG KYUN

1 patent

US8524851B2Sep 3, 2013

Silicon-based hardmask composition and process of producing semiconductor integrated circuit device using the same

KIM SANG KYUN13 citations80

CHO HYEON-MO

1 patent

US9291899B2Mar 22, 2016

Resist underlayer composition and method of manufacturing semiconductor integrated circuit device using the same

CHO HYEON-MO2 citations55