Inventor

NUNOZAWA REIZO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “NUNOZAWA REIZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OZAKI YUKIO

1 patent

US8443484B2May 21, 2013

Substrate processing apparatus

OZAKI YUKIO327 citations95

NOMURA MAKOTO

1 patent

US8904955B2Dec 9, 2014

Substrate processing apparatus

NOMURA MAKOTO1 citations48

TAKAHATA SATORU

1 patent

US9437465B2Sep 6, 2016

Substrate processing apparatus and method of manufacturing semiconductor device

TAKAHATA SATORU1 citations42