Inventor

TAKAHATA SATORU

JP8 patents

⚠️ This page may combine multiple inventors who share the name “TAKAHATA SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OZAKI YUKIO

2 patents

US8443484B2May 21, 2013

Substrate processing apparatus

OZAKI YUKIO327 citations95

US8457774B2Jun 4, 2013

Substrate processing apparatus, control method of the substrate processing apparatus, manufacturing method of semiconductor device and apparatus state shifting method

OZAKI YUKIO0 citations34

UBE INDUSTRIES

1 patent

US4551211ANov 5, 1985

Aqueous anodizing solution and process for coloring article of magnesium or magnesium-base alloy

UBE INDUSTRIES42 citations91

NOMURA MAKOTO

1 patent

US8904955B2Dec 9, 2014

Substrate processing apparatus

NOMURA MAKOTO1 citations48

HITACHI INT ELECTRIC INC

1 patent

US10452856B2Oct 22, 2019

Processing apparatus, controller and processing system

HITACHI INT ELECTRIC INC0 citations46

TAKAHATA SATORU

1 patent

US9437465B2Sep 6, 2016

Substrate processing apparatus and method of manufacturing semiconductor device

TAKAHATA SATORU1 citations42

KOKUSAI ELECTRIC CORP

1 patent

US11521880B2Dec 6, 2022

Substrate processing apparatus and recording medium for changing atmosphere of transfer chamber

KOKUSAI ELECTRIC CORP0 citations40

KAWAMOTO KOUICHI

1 patent

US9092894B2Jul 28, 2015

Display control device and display control program for grouping related items based upon location

KAWAMOTO KOUICHI0 citations39