Inventor
NA KYU TAE
US16 patents
⚠️ This page may combine multiple inventors who share the name “NA KYU TAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
12 patentsUS7192891B2Mar 20, 2007
Method for forming a silicon oxide layer using spin-on glass
SAMSUNG ELECTRONICS CO LTD21 citations92
US7601588B2Oct 13, 2009
Method of forming a trench isolation layer and method of manufacturing a non-volatile memory device using the same
SAMSUNG ELECTRONICS CO LTD12 citations83
US7585786B2Sep 8, 2009
Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
SAMSUNG ELECTRONICS CO LTD11 citations82
US7332409B2Feb 19, 2008
Methods of forming trench isolation layers using high density plasma chemical vapor deposition
SAMSUNG ELECTRONICS CO LTD13 citations82
US7517817B2Apr 14, 2009
Method for forming a silicon oxide layer using spin-on glass
SAMSUNG ELECTRONICS CO LTD7 citations73
US8017495B2Sep 13, 2011
Method of forming isolation layer structure and method of manufacturing a semiconductor device including the same
SAMSUNG ELECTRONICS CO LTD2 citations62
US7560383B2Jul 14, 2009
Method of forming a thin layer and method of manufacturing a non-volatile semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD2 citations62
US7358190B2Apr 15, 2008
Methods of filling gaps by deposition on materials having different deposition rates
SAMSUNG ELECTRONICS CO LTD6 citations62
US7598177B2Oct 6, 2009
Methods of filling trenches using high-density plasma deposition (HDP)
SAMSUNG ELECTRONICS CO LTD2 citations61
US7056827B2Jun 6, 2006
Methods of filling trenches using high-density plasma deposition (HDP)
SAMSUNG ELECTRONICS CO LTD3 citations61
US7745305B2Jun 29, 2010
Method of removing an oxide and method of filling a trench using the same
SAMSUNG ELECTRONICS CO LTD1 citations51
US7534698B2May 19, 2009
Methods of forming semiconductor devices having multilayer isolation structures
SAMSUNG ELECTRONICS CO LTD0 citations51