Inventor
KATO TOMOHIDE
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KATO TOMOHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
4 patentsUS7884034B2Feb 8, 2011
Method of manufacturing semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC20 citations89
US9263251B2Feb 16, 2016
Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations62
US8361902B2Jan 29, 2013
Substrate processing apparatus capable of cleaning inside thereof and cleaning control apparatus for controlling cleaning process of substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations60
US9123531B2Sep 1, 2015
Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC0 citations51