Inventor
HSIA YING TING
TW30 patents
Patents
30 patentsUS9812363B1Nov 7, 2017
FinFET device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD237 citations99
US10083863B1Sep 25, 2018
Contact structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD77 citations97
US11088025B2Aug 10, 2021
Contact structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations93
US9865697B1Jan 9, 2018
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD20 citations91
US10522408B2Dec 31, 2019
FinFET device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10269917B2Apr 23, 2019
Method of forming a FinFET with work function tuning layers having stair-step increment sidewalls
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10163715B2Dec 25, 2018
FinFET device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US9905456B1Feb 27, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10679896B2Jun 9, 2020
Contact structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10510598B2Dec 17, 2019
Self-aligned spacers and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US11437484B2Sep 6, 2022
Gate structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11776847B2Oct 3, 2023
Contact structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10141443B2Nov 27, 2018
Semiconductor devices FinFET devices with optimized strained-sourece-drain recess profiles and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11764081B2Sep 19, 2023
Wafer cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations69
US11056358B2Jul 6, 2021
Wafer cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US10510839B2Dec 17, 2019
Semiconductor device and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US12354913B2Jul 8, 2025
Contact structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12015070B2Jun 18, 2024
Gate structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11532515B2Dec 20, 2022
Self-aligned spacers and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11232978B2Jan 25, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10157782B2Dec 18, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10930783B2Feb 23, 2021
Semiconductor devices, FinFET devices with optimized strained source-drain recess profiles and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11588020B2Feb 21, 2023
Semiconductor device and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11251079B2Feb 15, 2022
Method for forming semiconductor device with gate stack
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11043559B2Jun 22, 2021
Method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12165887B2Dec 10, 2024
Wafer cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10651079B2May 12, 2020
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10804149B2Oct 13, 2020
Self-aligned spacers and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10692762B2Jun 23, 2020
Semiconductor device with gate stack
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10074563B2Sep 11, 2018
Structure and formation method of interconnection structure of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49