P

Inventor

DELGADINO GERARDO

US10 patents
⚠️ This page may combine multiple inventors who share the name “DELGADINO GERARDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

5 patents
US9779956B1Oct 3, 2017

Hydrogen activated atomic layer etching

LAM RES CORP109 citations96
US10079154B1Sep 18, 2018

Atomic layer etching of silicon nitride

LAM RES CORP17 citations83
US11594400B2Feb 28, 2023

Multi zone gas injection upper electrode system

LAM RES CORP6 citations74
US10134600B2Nov 20, 2018

Dielectric contact etch

LAM RES CORP1 citations49
US9040430B2May 26, 2015

Method of stripping organic mask with reduced damage to low-K film

LAM RES CORP1 citations42

APPLIED MATERIALS INC

2 patents
US6652712B2Nov 25, 2003

Inductive antenna for a plasma reactor producing reduced fluorine dissociation

APPLIED MATERIALS INC29 citations91
US6667577B2Dec 23, 2003

Plasma reactor with spoke antenna having a VHF mode with the spokes in phase

APPLIED MATERIALS INC28 citations90

DHINDSA RAJINDER

1 patent
US8652298B2Feb 18, 2014

Triode reactor design with multiple radiofrequency powers

DHINDSA RAJINDER160 citations98

BISE RYAN

1 patent
US10622195B2Apr 14, 2020

Multi zone gas injection upper electrode system

BISE RYAN2 citations65

MARAKHTANOV ALEXEI

1 patent
US9263240B2Feb 16, 2016

Dual zone temperature control of upper electrodes

MARAKHTANOV ALEXEI0 citations51