Inventor

KELLOGG MIKE

US4 patents

⚠️ This page may combine multiple inventors who share the name “KELLOGG MIKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US9508530B2Nov 29, 2016

Plasma processing chamber with flexible symmetric RF return strap

LAM RES CORP8 citations81

US11594400B2Feb 28, 2023

Multi zone gas injection upper electrode system

LAM RES CORP6 citations74

BISE RYAN

1 patent

US10622195B2Apr 14, 2020

Multi zone gas injection upper electrode system

BISE RYAN2 citations65

MARAKHTANOV ALEXEI

1 patent

US9263240B2Feb 16, 2016

Dual zone temperature control of upper electrodes

MARAKHTANOV ALEXEI0 citations51