Inventor
EHRLICH DARRELL
US16 patents
⚠️ This page may combine multiple inventors who share the name “EHRLICH DARRELL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
14 patentsUS11594400B2Feb 28, 2023
Multi zone gas injection upper electrode system
LAM RES CORP6 citations74
US11967517B2Apr 23, 2024
Electrostatic chuck with ceramic monolithic body
LAM RES CORP2 citations72
US11798789B2Oct 24, 2023
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
LAM RES CORP3 citations65
US9922804B2Mar 20, 2018
Compression member for use in showerhead electrode assembly
LAM RES CORP1 citations60
US12340989B2Jun 24, 2025
Electrostatic edge ring mounting system for substrate processing
LAM RES CORP0 citations59
US10978323B2Apr 13, 2021
Substrate holder having integrated temperature measurement electrical devices
LAM RES CORP0 citations57
US10186437B2Jan 22, 2019
Substrate holder having integrated temperature measurement electrical devices
LAM RES CORP1 citations57
US12500068B2Dec 16, 2025
Edge rings providing kinematic coupling and corresponding substrate processing systems
LAM RES CORP0 citations55
US12131890B2Oct 29, 2024
Chuck for plasma processing chamber
LAM RES CORP1 citations54
US10332729B2Jun 25, 2019
Compression member for use in showerhead electrode assembly
LAM RES CORP0 citations50
US12562350B2Feb 24, 2026
Moveable edge rings for plasma processing systems
LAM RES CORP0 citations47
US12381105B2Aug 5, 2025
Coolant channel with internal fins for substrate processing pedestals
LAM RES CORP0 citations47
US10667379B2May 26, 2020
Connections between laminated heater and heater voltage inputs
LAM RES CORP0 citations47
US10764966B2Sep 1, 2020
Laminated heater with different heater trace materials
LAM RES CORP0 citations36