Inventor
ULAVI TEJAS
US23 patents
Patents
23 patentsUS11430686B2Aug 30, 2022
Pedestal heater for spatial multi-wafer processing tool
APPLIED MATERIALS INC5 citations83
US10636628B2Apr 28, 2020
Method for cleaning a process chamber
APPLIED MATERIALS INC2 citations72
US10600624B2Mar 24, 2020
System and method for substrate processing chambers
APPLIED MATERIALS INC5 citations70
US12018376B2Jun 25, 2024
Apparatus and methods for motor shaft and heater leveling
APPLIED MATERIALS INC0 citations62
US11682576B2Jun 20, 2023
Pedestal heater for spatial multi-wafer processing tool
APPLIED MATERIALS INC0 citations62
US11479855B2Oct 25, 2022
Spatial wafer processing with improved temperature uniformity
APPLIED MATERIALS INC0 citations62
US10910243B2Feb 2, 2021
Thermal management system
APPLIED MATERIALS INC0 citations62
US12087555B2Sep 10, 2024
Method and system for cleaning a process chamber
APPLIED MATERIALS INC0 citations61
US11623253B2Apr 11, 2023
In-situ DC plasma for cleaning pedestal heater
APPLIED MATERIALS INC0 citations61
US11532462B2Dec 20, 2022
Method and system for cleaning a process chamber
APPLIED MATERIALS INC0 citations61
US11260432B2Mar 1, 2022
In-situ DC plasma for cleaning pedestal heater
APPLIED MATERIALS INC0 citations61
US11107704B2Aug 31, 2021
Gas input system for a substrate processing chamber
APPLIED MATERIALS INC0 citations60
US11769684B2Sep 26, 2023
Wafer heater with backside and integrated bevel purge
APPLIED MATERIALS INC0 citations59
US11791190B2Oct 17, 2023
Apparatus and methods for real-time wafer chucking detection
APPLIED MATERIALS INC0 citations58
US11950384B2Apr 2, 2024
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
APPLIED MATERIALS INC0 citations55
US11602064B2Mar 7, 2023
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
APPLIED MATERIALS INC0 citations55
US11434569B2Sep 6, 2022
Ground path systems for providing a shorter and symmetrical ground path
APPLIED MATERIALS INC0 citations52
US10787739B2Sep 29, 2020
Spatial wafer processing with improved temperature uniformity
APPLIED MATERIALS INC0 citations52
US11923233B2Mar 5, 2024
Dual-function wafer backside pressure control and edge purge
APPLIED MATERIALS INC0 citations51
US11049699B2Jun 29, 2021
Gas box for CVD chamber
APPLIED MATERIALS INC0 citations51
US10910238B2Feb 2, 2021
Heater pedestal assembly for wide range temperature control
APPLIED MATERIALS INC0 citations51
US12183618B2Dec 31, 2024
Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
APPLIED MATERIALS INC0 citations50
US12020957B2Jun 25, 2024
Heater assembly with process gap control for batch processing chambers
APPLIED MATERIALS INC0 citations48