Inventor
MORIMOTO MICHIKAZU
JP21 patents
⚠️ This page may combine multiple inventors who share the name “MORIMOTO MICHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
17 patentsUS8889024B2Nov 18, 2014
Plasma etching method
HITACHI HIGH TECH CORP17 citations92
US10600619B2Mar 24, 2020
Plasma processing apparatus
HITACHI HIGH TECH CORP11 citations85
US9336999B2May 10, 2016
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP7 citations84
US9349603B2May 24, 2016
Plasma processing method
HITACHI HIGH TECH CORP11 citations83
US10037909B2Jul 31, 2018
Plasma processing apparatus
HITACHI HIGH TECH CORP3 citations72
US9514967B2Dec 6, 2016
Plasma processing apparatus
HITACHI HIGH TECH CORP4 citations72
US9741579B2Aug 22, 2017
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP5 citations71
US9502217B2Nov 22, 2016
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP3 citations71
US8992724B2Mar 31, 2015
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP5 citations71
US11658011B2May 23, 2023
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations62
US11004658B2May 11, 2021
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations62
US10192718B2Jan 29, 2019
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations52
US10559481B2Feb 11, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations51
US10522331B2Dec 31, 2019
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations51
US8741166B2Jun 3, 2014
Plasma etching method
HITACHI HIGH TECH CORP0 citations51
US12437968B2Oct 7, 2025
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations44
US10727088B2Jul 28, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations41