P

Inventor

YASUI NAOKI

JP39 patents
⚠️ This page may combine multiple inventors who share the name “YASUI NAOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

26 patents
US7373899B2May 20, 2008

Plasma processing apparatus using active matching

HITACHI HIGH TECH CORP46 citations96
US7169255B2Jan 30, 2007

Plasma processing apparatus

HITACHI HIGH TECH CORP30 citations93
US7029594B2Apr 18, 2006

Plasma processing method

HITACHI HIGH TECH CORP19 citations93
US9336999B2May 10, 2016

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP7 citations84
US7615132B2Nov 10, 2009

Plasma processing apparatus having high frequency power source with sag compensation function and plasma processing method

HITACHI HIGH TECH CORP16 citations84
US11978612B2May 7, 2024

Plasma processing apparatus

HITACHI HIGH TECH CORP3 citations75
US11424105B2Aug 23, 2022

Plasma processing apparatus

HITACHI HIGH TECH CORP3 citations73
US10665516B2May 26, 2020

Etching method and plasma processing apparatus

HITACHI HIGH TECH CORP3 citations72
US10460913B2Oct 29, 2019

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP3 citations71
US9741579B2Aug 22, 2017

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP5 citations71
US9502217B2Nov 22, 2016

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP3 citations71
US8992724B2Mar 31, 2015

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP5 citations71
US10217613B2Feb 26, 2019

Plasma processing apparatus

HITACHI HIGH TECH CORP3 citations69
US12444572B2Oct 14, 2025

Plasma processing apparatus

HITACHI HIGH TECH CORP0 citations62
US11355315B2Jun 7, 2022

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP1 citations62
US11094512B2Aug 17, 2021

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP0 citations62
US11081320B2Aug 3, 2021

Plasma processing apparatus, plasma processing method, and ECR height monitor

HITACHI HIGH TECH CORP1 citations62
US11004658B2May 11, 2021

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP0 citations62
US10699884B2Jun 30, 2020

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP1 citations62
US12094687B2Sep 17, 2024

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP1 citations59
US10192718B2Jan 29, 2019

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP0 citations52
US7807581B2Oct 5, 2010

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP0 citations52
US12347656B2Jul 1, 2025

Plasma processing apparatus

HITACHI HIGH TECH CORP0 citations51
US11152192B2Oct 19, 2021

Plasma processing apparatus and method

HITACHI HIGH TECH CORP0 citations51
US11417501B2Aug 16, 2022

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP0 citations48
US10037868B2Jul 31, 2018

Plasma processing apparatus

HITACHI HIGH TECH CORP0 citations41

ASAHI OPTICAL CO LTD

6 patents

HITACHI LTD

2 patents

WATANABE SEIICHI

2 patents

YASUI NAOKI

1 patent

HITACHI HIGH-TECH CORP

1 patent

TAMURA HITOSHI

1 patent