Inventor
ISHII MAMORU
JP17 patents
⚠️ This page may combine multiple inventors who share the name “ISHII MAMORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI METALS LTD
6 patentsUS9970801B2May 15, 2018
Thermal mass-flow meter and mass-flow control device using same
HITACHI METALS LTD4 citations72
US11550341B2Jan 10, 2023
Mass flow control system, and semiconductor manufacturing equipment and vaporizer including the system
HITACHI METALS LTD0 citations51
US11442476B2Sep 13, 2022
Flow controller
HITACHI METALS LTD0 citations51
US9903497B2Feb 27, 2018
Flow control valve and a mass flow controller using the same
HITACHI METALS LTD1 citations50
US10310521B2Jun 4, 2019
Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller
HITACHI METALS LTD0 citations41
US10859417B2Dec 8, 2020
Thermal mass flow sensor, method for manufacturing the thermal mass flow sensor, and thermal mass flow meter using the thermal mass flow sensor
HITACHI METALS LTD0 citations39