Inventor
GU JAMYUNG
KR4 patents
Patents
4 patentsUS10867775B2Dec 15, 2020
Apparatus and method for treating substrate
SEMES CO LTD4 citations66
US10600618B2Mar 24, 2020
Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus
SEMES CO LTD1 citations58
US11587770B2Feb 21, 2023
Apparatus and method for treating substrate
SEMES CO LTD1 citations53
US11244847B2Feb 8, 2022
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations47