Inventor
DEMOS ALEXANDROS
US16 patents
⚠️ This page may combine multiple inventors who share the name “DEMOS ALEXANDROS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
15 patentsUS10797133B2Oct 6, 2020
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
ASM IP HOLDING BV2 citations72
US11764101B2Sep 19, 2023
Susceptor for semiconductor substrate processing
ASM IP HOLDING BV4 citations71
US11053591B2Jul 6, 2021
Multi-port gas injection system and reactor system including same
ASM IP HOLDING BV4 citations69
USD1031676SJun 18, 2024
Combined susceptor, support, and lift system
ASM IP HOLDING BV2 citations68
US12428726B2Sep 30, 2025
Gas injection system and reactor system including same
ASM IP HOLDING BV2 citations66
US11296189B2Apr 5, 2022
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
ASM IP HOLDING BV0 citations61
US12378665B2Aug 5, 2025
High temperature coatings for a preclean and etch apparatus and related methods
ASM IP HOLDING BV1 citations60
US12522916B2Jan 13, 2026
Systems and methods for processing a silicon surface using multiple radical species
ASM IP HOLDING BV0 citations58
US12006572B2Jun 11, 2024
Reactor system including a gas distribution assembly for use with activated species and method of using same
ASM IP HOLDING BV1 citations58
US12354893B2Jul 8, 2025
Fixture and method for determining position of a target in a reaction chamber
ASM IP HOLDING BV0 citations57
US11482533B2Oct 25, 2022
Apparatus and methods for plug fill deposition in 3-D NAND applications
ASM IP HOLDING BV1 citations56
US12394659B2Aug 19, 2025
Susceptors with film deposition control features
ASM IP HOLDING BV0 citations48
US12564001B2Feb 24, 2026
Dual pyrometer systems for substrate temperature control during film deposition
ASM IP HOLDING BV0 citations47
US12563998B2Feb 24, 2026
Apparatus and methods for cooling reaction chambers in semiconductor processing systems
ASM IP HOLDING BV0 citations46
US12575381B2Mar 10, 2026
Method of forming silicon within a gap on a surface of a substrate
ASM IP HOLDING BV0 citations44