Inventor
KU YI-SHA
TW27 patents
⚠️ This page may combine multiple inventors who share the name “KU YI-SHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IND TECH RES INST
18 patentsUS7532317B2May 12, 2009
Scatterometry method with characteristic signatures matching
IND TECH RES INST16 citations83
US8830458B2Sep 9, 2014
Measurement systems and measurement methods
IND TECH RES INST4 citations72
US8386969B2Feb 26, 2013
Method for designing overlay targets and method and system for measuring overlay error using the same
IND TECH RES INST5 citations72
US9752866B2Sep 5, 2017
Measurement system
IND TECH RES INST4 citations68
US7652776B2Jan 26, 2010
Structure and method for overlay measurement
IND TECH RES INST4 citations62
US7430052B2Sep 30, 2008
Method for correlating the line width roughness of gratings and method for measurement
IND TECH RES INST6 citations62
US7800824B2Sep 21, 2010
Method for designing gratings
IND TECH RES INST2 citations61
US11248903B2Feb 15, 2022
Three-dimension measurement device and operation method thereof
IND TECH RES INST0 citations60
US7864324B2Jan 4, 2011
Reflective scatterometer
IND TECH RES INST4 citations60
US7619753B2Nov 17, 2009
Method for measuring dimensions and optical system using the same
IND TECH RES INST2 citations60
US12007221B2Jun 11, 2024
Heterogeneous integration detecting method and heterogeneous integration detecting apparatus
IND TECH RES INST0 citations58
US7872741B2Jan 18, 2011
Method and apparatus for scatterfield microscopical measurement
IND TECH RES INST3 citations58
US7355713B2Apr 8, 2008
Method for inspecting a grating biochip
IND TECH RES INST0 citations51
US7610170B2Oct 27, 2009
Method for enhancing the measurement capability of multi-parameter inspection systems
IND TECH RES INST1 citations50
US12354290B2Jul 8, 2025
Sample depth-measuring device and method
IND TECH RES INST0 citations48
US7433060B2Oct 7, 2008
Method for correlating a structural parameter of a plurality of gratings and method for determining a structural parameter value of an unknown grating using the same
IND TECH RES INST0 citations48
US9182681B2Nov 10, 2015
Method and system for measuring a stacking overlay error by focusing on one of upper and lower layer overlay marks using a differential interference contrast microscope
IND TECH RES INST0 citations41
US10094774B2Oct 9, 2018
Scattering measurement system and method
IND TECH RES INST0 citations39
NANOMETRICS INC
3 patentsKU YI SHA
3 patentsUS8699021B2Apr 15, 2014
System, method and computer readable medium for through silicon via structure measurement
KU YI SHA5 citations70
US8321821B2Nov 27, 2012
Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the same
KU YI SHA4 citations59
US8139233B2Mar 20, 2012
System and method for via structure measurement
KU YI SHA2 citations59