Inventor
LUE PING-CHANG
US10 patents
⚠️ This page may combine multiple inventors who share the name “LUE PING-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
8 patentsUS5883012AMar 16, 1999
Method of etching a trench into a semiconductor substrate
MOTOROLA INC240 citations97
US5591676AJan 7, 1997
Method of making a semiconductor device having a low permittivity dielectric
MOTOROLA INC51 citations95
US5442237AAug 15, 1995
Semiconductor device having a low permittivity dielectric
MOTOROLA INC75 citations95
US6326228B1Dec 4, 2001
Sensor and method of fabrication
MOTOROLA INC51 citations94
US5207866AMay 4, 1993
Anisotropic single crystal silicon etching solution and method
MOTOROLA INC26 citations92
US5798556AAug 25, 1998
Sensor and method of fabrication
MOTOROLA INC20 citations88
US5824601AOct 20, 1998
Carboxylic acid etching solution and method
MOTOROLA INC47 citations86
US6274515B1Aug 14, 2001
Spin-on dielectric formation process for use in manufacturing semiconductors
MOTOROLA INC15 citations83