Inventor
ALLEN PAUL C
US26 patents
⚠️ This page may combine multiple inventors who share the name “ALLEN PAUL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ETEC SYSTEMS INC
9 patentsUS5227839AJul 13, 1993
Small field scanner
ETEC SYSTEMS INC91 citations96
US5386221AJan 31, 1995
Laser pattern generation apparatus
ETEC SYSTEMS INC88 citations95
US6037967AMar 14, 2000
Short wavelength pulsed laser scanner
ETEC SYSTEMS INC71 citations94
US5757469AMay 26, 1998
Scanning lithography system haing double pass Wynne-Dyson optics
ETEC SYSTEMS INC42 citations92
US5739964AApr 14, 1998
Magnification correction for small field scanning
ETEC SYSTEMS INC21 citations92
US5255051AOct 19, 1993
Small field scanner
ETEC SYSTEMS INC40 citations92
US6271514B1Aug 7, 2001
Multi-beam scanner including a dove prism array
ETEC SYSTEMS INC16 citations84
US6295157B1Sep 25, 2001
Thermally balanced acousto-optic modulator
ETEC SYSTEMS INC19 citations83
US5815245ASep 29, 1998
Scanning lithography system with opposing motion
ETEC SYSTEMS INC8 citations74
APPLIED MATERIALS INC
8 patentsUS6828574B1Dec 7, 2004
Modulator driven photocathode electron beam generator
APPLIED MATERIALS INC35 citations92
US6532097B1Mar 11, 2003
Image registration apparatus having an adjustable reflective diffraction grating and method
APPLIED MATERIALS INC23 citations92
US6448568B1Sep 10, 2002
Electron beam column using high numerical aperture photocathode source illumination
APPLIED MATERIALS INC48 citations92
US6724002B2Apr 20, 2004
Multiple electron beam lithography system with multiple beam modulated laser illumination
APPLIED MATERIALS INC41 citations90
US7483196B2Jan 27, 2009
Apparatus for multiple beam deflection and intensity stabilization
APPLIED MATERIALS INC16 citations78
US6751000B2Jun 15, 2004
Reflective diffraction of radiation beams for image registration
APPLIED MATERIALS INC5 citations74
US6731320B1May 4, 2004
Laser pattern generator
APPLIED MATERIALS INC12 citations68
US6897888B2May 24, 2005
Scanning brush and method of use
APPLIED MATERIALS INC2 citations57