Inventor

APPICH KARL

DE4 patents

⚠️ This page may combine multiple inventors who share the name “APPICH KARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG MICRO TECH GMBH

2 patents

US5654041AAug 5, 1997

Method and device for lacquering or coating of a substrate by a capillary slot

STEAG MICRO TECH GMBH25 citations87

US5650196AJul 22, 1997

Device for coating substrates in semiconductor production

STEAG MICRO TECH GMBH12 citations65

STEAG MICROTECH GMBH STERNENFE

1 patent

US5455062AOct 3, 1995

Capillary device for lacquering or coating plates or disks

STEAG MICROTECH GMBH STERNENFE24 citations83

STEAG HAMA TECH AG

1 patent

US6858088B1Feb 22, 2005

Method and apparatus for treating substrates

STEAG HAMA TECH AG7 citations69