Inventor
NARIMAN HOMI E
US13 patents
Patents
13 patentsUS6157081ADec 5, 2000
High-reliability damascene interconnect formation for semiconductor fabrication
ADVANCED MICRO DEVICES INC83 citations96
US6767835B1Jul 27, 2004
Method of making a shaped gate electrode structure, and device comprising same
ADVANCED MICRO DEVICES INC25 citations92
US6742168B1May 25, 2004
Method and structure for calibrating scatterometry-based metrology tool used to measure dimensions of features on a semiconductor device
ADVANCED MICRO DEVICES INC24 citations92
US6660543B1Dec 9, 2003
Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depth
ADVANCED MICRO DEVICES INC22 citations92
US6146952ANov 14, 2000
Semiconductor device having self-aligned asymmetric source/drain regions and method of fabrication thereof
ADVANCED MICRO DEVICES INC18 citations84
US6972853B1Dec 6, 2005
Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same
ADVANCED MICRO DEVICES INC12 citations83
US6265283B1Jul 24, 2001
Self-aligning silicon oxynitride stack for improved isolation structure
ADVANCED MICRO DEVICES INC13 citations74
US6096643AAug 1, 2000
Method of fabricating a semiconductor device having polysilicon line with extended silicide layer
ADVANCED MICRO DEVICES INC8 citations74
US6933158B1Aug 23, 2005
Method of monitoring anneal processes using scatterometry, and system for performing same
ADVANCED MICRO DEVICES INC11 citations73
US6927080B1Aug 9, 2005
Structures for analyzing electromigration, and methods of using same
ADVANCED MICRO DEVICES INC10 citations73
US6791697B1Sep 14, 2004
Scatterometry structure with embedded ring oscillator, and methods of using same
ADVANCED MICRO DEVICES INC11 citations73
US6881594B1Apr 19, 2005
Method of using scatterometry for analysis of electromigration, and structures for performing same
ADVANCED MICRO DEVICES INC2 citations62
US6249032B1Jun 19, 2001
Semiconductor device having patterned metal layer over a polysilicon line and method of fabrication thereof
ADVANCED MICRO DEVICES INC0 citations52