Inventor
OLSEN LEIF C
US4 patents
Patents
4 patentsUS6555476B1Apr 29, 2003
Silicon carbide as a stop layer in chemical mechanical polishing for isolation dielectric
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US6528426B1Mar 4, 2003
Integrated circuit interconnect and method
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US6255211B1Jul 3, 2001
Silicon carbide stop layer in chemical mechanical polishing over metallization layers
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US7759182B2Jul 20, 2010
Dummy active area implementation
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