Inventor
MAYUSUMI MASANORI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “MAYUSUMI MASANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUPER SILICON CRYSTAL RES INST
4 patentsUS6578589B1Jun 17, 2003
Apparatus for manufacturing semiconductor wafer
SUPER SILICON CRYSTAL RES INST516 citations97
US6262393B1Jul 17, 2001
Epitaxial growth furnace
SUPER SILICON CRYSTAL RES INST48 citations92
US6245152B1Jun 12, 2001
Method and apparatus for producing epitaxial wafer
SUPER SILICON CRYSTAL RES INST43 citations92
US6863735B1Mar 8, 2005
Epitaxial growth furnace
SUPER SILICON CRYSTAL RES INST7 citations72