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Inventor

SHERMAN ARTHUR

US13 patents
⚠️ This page may combine multiple inventors who share the name “SHERMAN ARTHUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

(unassigned)

4 patents
US5916365AJun 29, 1999

Sequential chemical vapor deposition

1,534 citations98
US5535090AJul 9, 1996

Electrostatic chuck

92 citations95
US6141203AOct 31, 2000

Electrostatic chuck

28 citations92
US5867359AFeb 2, 1999

Electrostatic chuck

27 citations92

ASM INT

2 patents
US7682657B2Mar 23, 2010

Sequential chemical vapor deposition

ASM INT602 citations98
US7410671B2Aug 12, 2008

Sequential chemical vapor deposition

ASM INT14 citations92

LICENSEE FOR MICROELECTRONICS

2 patents
US6652924B2Nov 25, 2003

Sequential chemical vapor deposition

LICENSEE FOR MICROELECTRONICS693 citations98
US6342277B1Jan 29, 2002

Sequential chemical vapor deposition

LICENSEE FOR MICROELECTRONICS791 citations98

SHERMAN ARTHUR

2 patents
US7399357B2Jul 15, 2008

Atomic layer deposition using multilayers

SHERMAN ARTHUR9 citations81
US8323737B2Dec 4, 2012

Sequential chemical vapor deposition

SHERMAN ARTHUR0 citations49

ASM INC

1 patent
US6616986B2Sep 9, 2003

Sequential chemical vapor deposition

ASM INC434 citations98

APPLIED MATERIALS INC

1 patent
US4563367AJan 7, 1986

Apparatus and method for high rate deposition and etching

APPLIED MATERIALS INC140 citations97

VARIAN ASSOCIATES

1 patent
US5426558AJun 20, 1995

Anti-stick electrostatic chuck for a low pressure environment

VARIAN ASSOCIATES57 citations96