Inventor
BHAGWAT VRUNDA
US2 patents
Patents
2 patentsUS6415193B1Jul 2, 2002
Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment
FABCENTRIC INC100 citations94
US6665575B2Dec 16, 2003
Recipe editor for editing and creating process recipes with parameter-level security for various kinds of semiconductor-manufacturing equipment
FABCENTRIC INC37 citations89