Inventor
FUKUMOTO TAKAAKI
JP44 patents
⚠️ This page may combine multiple inventors who share the name “FUKUMOTO TAKAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
34 patentsUS5216890AJun 8, 1993
Device for and method of producing hyperfine frozen particles
MITSUBISHI ELECTRIC CORP65 citations96
US5147466ASep 15, 1992
Method of cleaning a surface by blasting the fine frozen particles against the surface
MITSUBISHI ELECTRIC CORP52 citations96
US4974375ADec 4, 1990
Ice particle forming and blasting device
MITSUBISHI ELECTRIC CORP55 citations96
US4465529AAug 14, 1984
Method of producing semiconductor device
MITSUBISHI ELECTRIC CORP81 citations96
US5380471AJan 10, 1995
Aeration apparatus for producing ultrapure water
MITSUBISHI ELECTRIC CORP75 citations94
US5283989AFeb 8, 1994
Apparatus for polishing an article with frozen particles
MITSUBISHI ELECTRIC CORP89 citations93
US6207296B1Mar 27, 2001
Inorganic filler, epoxy resin composition, and semiconductor device
MITSUBISHI ELECTRIC CORP15 citations92
US5336356AAug 9, 1994
Apparatus for treating the surface of a semiconductor substrate
MITSUBISHI ELECTRIC CORP55 citations92
US5246586ASep 21, 1993
Apparatus and method for producing ultrapure water and method of controlling the apparatus
MITSUBISHI ELECTRIC CORP32 citations92
US5081068AJan 14, 1992
Method of treating surface of substrate with ice particles and hydrogen peroxide
MITSUBISHI ELECTRIC CORP27 citations92
US5074083ADec 24, 1991
Cleaning device using fine frozen particles
MITSUBISHI ELECTRIC CORP30 citations92
US5053064AOct 1, 1991
Air conditioning apparatus for a clean room
MITSUBISHI ELECTRIC CORP33 citations92
US4986216AJan 22, 1991
Semiconductor manufacturing apparatus
MITSUBISHI ELECTRIC CORP46 citations92
US4893320AJan 9, 1990
Apparatus for counting particles attached to surfaces of a solid
MITSUBISHI ELECTRIC CORP31 citations92
US4834137AMay 30, 1989
Safety device for vessels of compressed gases
MITSUBISHI ELECTRIC CORP55 citations92
US4765963AAug 23, 1988
Apparatus for measuring impurities in water
MITSUBISHI ELECTRIC CORP28 citations92
US4719088AJan 12, 1988
Apparatus for removing at least one acidic component from a gas
MITSUBISHI ELECTRIC CORP60 citations91
US5470461ANov 28, 1995
Apparatus for producing pure water
MITSUBISHI ELECTRIC CORP35 citations90
US5186907AFeb 16, 1993
Apparatus for treating organic waste gas
MITSUBISHI ELECTRIC CORP28 citations89
US5827339AOct 27, 1998
Apparatus for generating chemical-free dry air
MITSUBISHI ELECTRIC CORP25 citations88
US5752985AMay 19, 1998
Clean room having an air conditioning system
MITSUBISHI ELECTRIC CORP40 citations88
US4868996ASep 26, 1989
Method and apparatus for vapor drying
MITSUBISHI ELECTRIC CORP20 citations82
US4786473ANov 22, 1988
Apparatus for measuring impurities in pure water
MITSUBISHI ELECTRIC CORP20 citations81
US5554295ASep 10, 1996
Method for producing pure water
MITSUBISHI ELECTRIC CORP16 citations80
US5935314AAug 10, 1999
Inorganic filler, epoxy resin composition, and semiconductor device
MITSUBISHI ELECTRIC CORP11 citations74
US5048331ASep 17, 1991
Continuous rainwater monitoring system
MITSUBISHI ELECTRIC CORP11 citations74
US4696184ASep 29, 1987
Device for measuring the absolute value of the density of salts in atmosphere
MITSUBISHI ELECTRIC CORP9 citations74
US5344615ASep 6, 1994
Wet-process apparatus
MITSUBISHI ELECTRIC CORP7 citations73
US4411929AOct 25, 1983
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP6 citations71
US4820650AApr 11, 1989
Introducing lattice defect with ice particles in semiconductor wafer
MITSUBISHI ELECTRIC CORP17 citations70
US4869090ASep 26, 1989
Method of processing base plate for magnetic disc
MITSUBISHI ELECTRIC CORP15 citations69
US4569224AFeb 11, 1986
Device for measuring the absolute value of the density of salts in atmosphere
MITSUBISHI ELECTRIC CORP4 citations62
US4600888AJul 15, 1986
Device for continuously monitoring the density of atmospheric sodium ions
MITSUBISHI ELECTRIC CORP3 citations59
US4624834ANov 25, 1986
Device for measuring the absolute value of the density of salts in atmosphere
MITSUBISHI ELECTRIC CORP1 citations52
TAIYO SANSO CO LTD
5 patentsUS5035750AJul 30, 1991
Processing method for semiconductor wafers
TAIYO SANSO CO LTD56 citations95
US5025597AJun 25, 1991
Processing apparatus for semiconductor wafers
TAIYO SANSO CO LTD58 citations95
US4932168AJun 12, 1990
Processing apparatus for semiconductor wafers
TAIYO SANSO CO LTD60 citations95
US5129198AJul 14, 1992
Cleaning device for semiconductor wafers
TAIYO SANSO CO LTD11 citations73
US5114748AMay 19, 1992
Method of preparing or rubbing a substrate to be used in a lcd device by spraying it with uniformly sized droplets or frozen water
TAIYO SANSO CO LTD11 citations70