Inventor
DAVIS MATTHEW FENTON
US10 patents
⚠️ This page may combine multiple inventors who share the name “DAVIS MATTHEW FENTON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6485254B1Nov 26, 2002
Energy dissipating coupling
APPLIED MATERIALS INC30 citations91
US8009938B2Aug 30, 2011
Advanced process sensing and control using near infrared spectral reflectometry
APPLIED MATERIALS INC9 citations83
US7846845B2Dec 7, 2010
Integrated method for removal of halogen residues from etched substrates in a processing system
APPLIED MATERIALS INC16 citations82
US7969581B2Jun 28, 2011
Determining endpoint in a substrate process
APPLIED MATERIALS INC3 citations62
US7374696B2May 20, 2008
Method and apparatus for removing a halogen-containing residue
APPLIED MATERIALS INC4 citations61
US7946759B2May 24, 2011
Substrate temperature measurement by infrared transmission
APPLIED MATERIALS INC4 citations60
US7846347B2Dec 7, 2010
Method for removing a halogen-containing residue
APPLIED MATERIALS INC0 citations51