Inventor

BARTLAU PETER H

US3 patents

⚠️ This page may combine multiple inventors who share the name “BARTLAU PETER H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US6541351B1Apr 1, 2003

Method for limiting divot formation in post shallow trench isolation processes

IBM53 citations92

US11143953B2Oct 12, 2021

Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3

IBM0 citations61

BARTLAU PETER H

1 patent

US8568959B2Oct 29, 2013

Techniques for reducing degradation and/or modifying feature size of photomasks

BARTLAU PETER H3 citations54