Inventor
ONOZAWA KAZUHISA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “ONOZAWA KAZUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASAHI DENKA KOGYO KK
4 patentsUS6316064B1Nov 13, 2001
Process of producing a ruthenium or ruthenium oxide thin film
ASAHI DENKA KOGYO KK42 citations86
US5855651AJan 5, 1999
Method for processing waste gas exhausted from chemical vapor and deposition equipment
ASAHI DENKA KOGYO KK17 citations80
US6547863B2Apr 15, 2003
Metal compound solution and thin film formation using the same
ASAHI DENKA KOGYO KK3 citations61
US6429325B1Aug 6, 2002
Copper material for chemical vapor deposition and process for forming thin film using the same
ASAHI DENKA KOGYO KK4 citations57