Inventor
TSACOYEANES JAMES
US9 patents
⚠️ This page may combine multiple inventors who share the name “TSACOYEANES JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
6 patentsUS6922230B2Jul 26, 2005
DUV scanner linewidth control by mask error factor compensation
ASML HOLDING NV16 citations92
US7187430B2Mar 6, 2007
Advanced illumination system for use in microlithography
ASML HOLDING NV10 citations82
US6775069B2Aug 10, 2004
Advanced illumination system for use in microlithography
ASML HOLDING NV18 citations80
US6819402B2Nov 16, 2004
System and method for laser beam expansion
ASML HOLDING NV8 citations71
US8013979B2Sep 6, 2011
Illumination system with low telecentricity error and dynamic telecentricity correction
ASML HOLDING NV2 citations61
US7006198B2Feb 28, 2006
System and method for laser beam expansion
ASML HOLDING NV0 citations49